Wafer inspection is a key process for the semiconductor and optoelectronic industries. Analyzing wafers enables operators to monitor manufacturing conditions and improve product quality.
Delta's Wafer Inspection Machine Solution is an automated water appearance inspection system integrated with optical and visual inspection technology. Via the CANopen fieldbus, Delta's HMI DOP-100 Series allows users to command the PLC to control the axes for water feeding. The linear scanning camera captures and inspects the etching conditions. The whole system is stable, quick and precise. The durability and long lifespan of the linear motors offer consistent operation without much maintenance, and are suitable for wafer inspection applications.
Solution Introduction